Skip to main content

Micro and Nanoscale Engineering

in this section

nanofab
Master of Engineering students can be involved in all aspects of micro and nanoscale fluidic device design, fabrication and testing.
Master of Engineering Program - Micro-/Nanoscale Engineering Focus

Micro- and nanoscale systems are currently driving a large portion of modern engineering research because of the impact these systems can have on scientific discovery and technological development. Researchers in our Mechanical Engineering Graduate Field are taking advantage of our extensive nanofabrication infrastructure and experience to develop novel devices and explore new and exciting physics.

Research groups in the micro- and nanoscale engineering research focus in MAE encompass numerous fabrication techniques and applications. Our research includes miniaturized chemical analysis systems, chemical, optical, and mechanical sensors and actuators, and fundamental studies of thin film and interfacial phenomena.

Suggested Course Sequence Micro-/ Nanoscale Engineering Focus

Term 1: Fundamentals of Micro and Nanoscale Engineering

Coursework
Highly recommended 

  • MAE 5240/6240 – Physics of Micro- and Nanoscale Fluid Mechanics (3 or 4 credits)
  • A&EP 6610 – Nanocharacterization (3 credits)

Electives

  • MAE 6010 – Foundations of Fluid Dynamics and Aerodynamics (4 credits)
  • BME 6310/ ChBE 6310 - Engineering Principals for Drug Delivery (3 credits)
  • MS&E 5890 – Colloids and Colloidal Assemblies for Advanced Materials Applications (3 credits)

Research

  • Research Project within Micro-Nanoscale Engineering Group (4 credits)

Term 2: Applications of Micro and Nanoscale Engineering

Coursework
Highly recommended 

  • MAE 6560 – Nanoscale Energy Transport and Conversion (3 credits)
  • A&EP 6630 – NanoBioTechnology (3 credits)

Electives

  • A&EP 6620 – Micro-/Nano-fabrication and Processing (3 credits)
  • ECE 5360/ MS&E 5410 – Nanofabrication (3, 4 or 5 credits)
  • ECE 4320 – MEMS (3 credits)
  • BEE 6590 - biosensors and bioanalytical techniques (4 credits)
  • MAE 6020 – Foundations of Fluid Dynamics and Aerodynamics II (3 credits)
  • MAE 7150 – Atomistic Modeling of Materials (4 credits)

Research

  • Research Project within Micro-Nanoscale Engineering Group (4 credits)